SMALL BUSINESS INNOVATION RESEARCH (SBIR) PROGRAM FOR CHIPS FOR AMERICA – CHIPS METROLOGY
Metrology plays a key role in semiconductor manufacturing. As devices become more complex, smaller, and multi-layered, the ability to measure, monitor, predict, and ensure quality in manufacturing becomes much more difficult and uncertain. Today, the domestic semiconductor industry faces some of these metrology challenges with workarounds and inadequate tools, limiting production yields, impacting quality, and increasing costs. As greater demands are put on semiconductor device performance and material requirements, these challenges will continue to intensify. The metrology challenges impacting the U.S. semiconductor industry are at a critical stage and urgently need to be addressed (for more information, see the seven Grand Challenges, outlined in the Strategic Opportunities for U.S. Semiconductor Manufacturing publication).
NIST has been a crucial partner in helping the U.S. microelectronics industry in the development and manufacturing of next-generation devices. Breakthroughs in measurement science, standards, material characterization, instrumentation, testing, and manufacturing capabilities are necessary to realize the potential of emerging 3D devices and 3D heterogeneous integration. As devices become more complex, highly integrated, and smaller, ensuring performance becomes more challenging. Meeting dimensional tolerances, performance, and reliability over a range of environments becomes increasingly difficult. This SBIR effort aims to:
- Advance U.S. leadership in documentary standards development.
- Develop and deploy critically needed measurement services.
- Develop and deploy innovative manufacturing metrologies.
PROJECT TIMELINE
Program Name: Small Business Innovation Research (SBIR) Program for CHIPS For America – CHIPS Metrology
Solicitation Number: 2024-SBIR-CHIPS-01
Topic Description: Metrology
Deadline: June 14, 2024
Sponsor: National Institute of Standards and Technology (NIST), United States Department of Commerce (DoC)
Anticipated Budget: First Year: $50 Million